Thermal stability study on titanium disilicide (tisi2) thin films with titanium nitride (tin) capping using atomic force microscopy
| Cyhoeddwyd yn: | Philippine Engineering Journal Vol. 23, no. 2 (2002), 49-62 |
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| Prif Awdur: | |
| Awduron Eraill: | |
| Fformat: | Erthygl |
| Iaith: | English |
| Cyhoeddwyd: |
2002
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