Manay, R., Abellana, V., & Sarmago, R. V. (2001). Silicon nitride (SiNxHy) by plasma-enhanced chemical vapor deposition. Science Diliman.
Cita Chicago Style (17a ed.)Manay, R.L, V.Y Abellana, y Roland V. Sarmago. "Silicon Nitride (SiNxHy) by Plasma-enhanced Chemical Vapor Deposition." Science Diliman 2001.
Cita MLA (9a ed.)Manay, R.L, et al. "Silicon Nitride (SiNxHy) by Plasma-enhanced Chemical Vapor Deposition." Science Diliman, 2001.
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