APA (7th ed.) Citation

Manay, R., Abellana, V., & Sarmago, R. V. (2001). Silicon nitride (SiNxHy) by plasma-enhanced chemical vapor deposition. Science Diliman.

Chicago Style (17th ed.) Citation

Manay, R.L, V.Y Abellana, and Roland V. Sarmago. "Silicon Nitride (SiNxHy) by Plasma-enhanced Chemical Vapor Deposition." Science Diliman 2001.

MLA (9th ed.) Citation

Manay, R.L, et al. "Silicon Nitride (SiNxHy) by Plasma-enhanced Chemical Vapor Deposition." Science Diliman, 2001.