TY  - JOUR
T1  - Synthesis of ZrN film via the plasma sputter-type negative ion source
JF  - Science Diliman
A1  - Valmoria, Nico
A2  - Mendenilla, Alexander
A2  - Yambot, Miguel
A2  - Mena, Manolo
A2  - Ramos, Henry
LA  - English
YR  - 1999
UL  - https://tuklas.up.edu.ph/Record/IPP-00000631211
KW  - Ion sources
KW  - Plasma physics
ER  -