Pulsed 1064 nm Nd-YAG laser deposition of titanium on silicon in a nitrogen environment
| izdano v: | Science Diliman Vol. 11, no. 2 (1999), 33-38 |
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| Glavni avtor: | |
| Drugi avtorji: | , , |
| Format: | Article |
| Jezik: | English |
| Izdano: |
1999
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| Teme: |