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  1. 1

    Handbook of silicon based MEMS materials and technologies

    出版 2020
    Available for University of the Philippines System via ScienceDirect. Click here to access
    Also available remotely for University of the Philippines System via ScienceDirect. Click here to access thru EZproxy
    Electronic Resource

    Handbook of silicon based MEMS materials and technologies
  2. 2

    Handbook of silicon based MEMS materials and technologies

    出版 2015
    Available for University of the Philippines System via ScienceDirect. Click here to access
    Also available remotely for University of the Philippines System via ScienceDirect. Click here to access thru EZproxy
    Electronic Resource

    Handbook of silicon based MEMS materials and technologies

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