Showing 1 - 1 results of 1 for search 'Nieh, R.E', query time: 0.01s Refine Results
  1. 1

    Electrical characterization and material evaluation of zirconium oxynitride gate dielectric in TaN-gated NMOSFETs with high-temperature forming gas annealing. by Nieh, R.E

    Article

    Electrical characterization and material evaluation of zirconium oxynitride gate dielectric in TaN-gated NMOSFETs with high-temperature forming gas annealing.

Search Tools: