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    An investigation into the supercritical CO₂/Co-solvent extraction of porogen and surfactant templates from organosilicate thin films for low-k applications von Lubguban, Arnold A.

    Veröffentlicht 2006
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    Electronic Resource

    An investigation into the supercritical CO₂/Co-solvent extraction of porogen and surfactant templates from organosilicate thin films for low-k applications

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