Performance of plasma cathode for a magnetized sheet plasma device gan Fernandez, Marcedon S., Doi, Kenta, Malapit, Giovanni M., Villamayor, Michelle Marie S., Wada, Motoi, Ramos, Henry J.

Sheet plasma configurations suitable for materials processing gan Ramos, Henry J., Doi, Kenta, Fernandez, Marcedon S., Malapit, Giovanni M., Sasao, Mamiko, Villamayor, Michelle Marie S., Wada, Motoi

Formation of SiHx on Silicon (100) using low energy negative hydrogen ions from a magnetized sheet plasma source gan Fernandez, Marcedon S.