Performance of plasma cathode for a magnetized sheet plasma device od Fernandez, Marcedon S., Doi, Kenta, Malapit, Giovanni M., Villamayor, Michelle Marie S., Wada, Motoi, Ramos, Henry J.

Sheet plasma configurations suitable for materials processing od Ramos, Henry J., Doi, Kenta, Fernandez, Marcedon S., Malapit, Giovanni M., Sasao, Mamiko, Villamayor, Michelle Marie S., Wada, Motoi

Formation of SiHx on Silicon (100) using low energy negative hydrogen ions from a magnetized sheet plasma source od Fernandez, Marcedon S.