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    MEMS field models and optimal design von Di Barba, Paolo, Wiak, Slawomir

    Veröffentlicht 2020
    Available for University of the Philippines Diliman via SpringerLink. Click here to access
    Also available remotely for University of the Philippines Diliman via SpringerLink. Click here to access thru EZproxy
    Electronic Resource

    MEMS field models and optimal design

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